Title :
Effect of catalyst and underlayer metal on PECVD growth of vertically aligned carbon nanotubes
Author :
Sun, Xuhui ; Li, Ke ; Wu, Wen ; Saito, Tsutomu ; Yang, Cary Y.
Author_Institution :
Center for Nanostruct., Santa Clara Univ., Santa Clara, CA, USA
Abstract :
Growth behavior of vertically aligned carbon nanotubes (CNTs) grown on different underlayer metals is investigated. The average diameter, diameter distribution, density, and growth rate of CNTs exhibit strong correlation with the choice of metal and catalyst. These observations are analyzed in terms of the interactions between the catalyst and the underlayer metal.
Keywords :
carbon nanotubes; catalysts; metals; plasma CVD; C; PECVD growth; catalyst; metal underlayer; strong correlation; vertically aligned carbon nanotubes; Annealing; CMOS technology; Carbon nanotubes; Chromium; Iron; Nanostructures; Plasma temperature; Scanning electron microscopy; Semiconductor films; Substrates; PECVD; carbon nanotube synthesis; vertical aligned CNT;
Conference_Titel :
Nanotechnology Materials and Devices Conference, 2009. NMDC '09. IEEE
Conference_Location :
Traverse City, MI
Print_ISBN :
978-1-4244-4695-7
Electronic_ISBN :
978-1-4244-4696-4
DOI :
10.1109/NMDC.2009.5167547
