DocumentCode :
2578901
Title :
Copper Integration In Self Aligned Dual Damascene Architecture
Author :
Morand, Y. ; Lerme, M. ; Palleau, J. ; Torres, J. ; Vinet, F. ; Demolliens, O. ; Ulmer, L. ; Gobil, Y. ; Fayolle, M. ; Romagna, F. ; Le Bihan, R.
Author_Institution :
LETI ( CEA- Technologies Avancees)- CEA-G, 7 rue des martyrs, F- 38054 Grenoble Cedex 9, France
fYear :
1997
fDate :
10-12 June 1997
Firstpage :
31
Lastpage :
32
fLanguage :
English
Publisher :
ieee
Conference_Titel :
VLSI Technology, 1997. Digest of Technical Papers., 1997 Symposium on
Print_ISBN :
4-930813-75-1
Type :
conf
DOI :
10.1109/VLSIT.1997.623680
Filename :
623680
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2578901
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