DocumentCode :
2578915
Title :
A 5-mask CMOS Technology
Author :
Onishi, H. ; Imai, K. ; Nakamura, H. ; Matsubara, Y. ; Yamada, Y. ; Tamura, T. ; Sakai, T. ; Horiuchi, T.
Author_Institution :
ULSI Device Development Laboratories, NEC Corporation 1120 Shimokuzawa, Sagamihara, Kanagawa 229-11, Japan
fYear :
1997
fDate :
10-12 June 1997
Firstpage :
33
Lastpage :
34
fLanguage :
English
Publisher :
ieee
Conference_Titel :
VLSI Technology, 1997. Digest of Technical Papers., 1997 Symposium on
Print_ISBN :
4-930813-75-1
Type :
conf
DOI :
10.1109/VLSIT.1997.623681
Filename :
623681
Link To Document :
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