Title :
3D microstructure fabrication for a dot array micro-optics using synchrotron radiation
Author :
Utsumi, Y. ; Minamitani, M. ; Hattori, T.
Author_Institution :
Lab. of a Adv. Sci. & Technol. for Ind., Himeji Inst. of Technol., Hyogo, Japan
Abstract :
In this paper, lighting panels for liquid crystal displays (LCD) with accurate 3D microstructures were designed using the simulation tool and fabricated using deep X-ray lithography by synchrotron radiation. Optical properties were also evaluated.
Keywords :
X-ray lithography; crystal microstructure; liquid crystal displays; luminescence; micro-optics; 3D microstructure; LCD; deep x-ray lithography; dot array; lighting panels; liquid crystal display; microoptics; optical properties; simulation; synchrotron radiation; Charge coupled devices; Charge-coupled image sensors; Energy consumption; Fabrication; Light emitting diodes; Microstructure; Optical arrays; Personal digital assistants; Synchrotron radiation; US Department of Transportation;
Conference_Titel :
Microprocesses and Nanotechnology Conference, 2003. Digest of Papers. 2003 International
Conference_Location :
Tokyo, Japan
Print_ISBN :
4-89114-040-2
DOI :
10.1109/IMNC.2003.1268622
