Title :
A Novel Environmentally-friendly Corrosion-free Post-stripping Rinsing Procedure After Solvent Strip
Author :
Vos, R. ; Rotondaro, A. ; Mertens, P.W. ; Meuris, M. ; Heyns, M.
Author_Institution :
IMEC, Kapeldreef 57, B-3001 Heverlee, BELGIUM
Conference_Titel :
VLSI Technology, 1997. Digest of Technical Papers., 1997 Symposium on
Print_ISBN :
4-930813-75-1
DOI :
10.1109/VLSIT.1997.623683
