DocumentCode
2579002
Title
A Novel Environmentally-friendly Corrosion-free Post-stripping Rinsing Procedure After Solvent Strip
Author
Vos, R. ; Rotondaro, A. ; Mertens, P.W. ; Meuris, M. ; Heyns, M.
Author_Institution
IMEC, Kapeldreef 57, B-3001 Heverlee, BELGIUM
fYear
1997
fDate
10-12 June 1997
Firstpage
37
Lastpage
38
fLanguage
English
Publisher
ieee
Conference_Titel
VLSI Technology, 1997. Digest of Technical Papers., 1997 Symposium on
Print_ISBN
4-930813-75-1
Type
conf
DOI
10.1109/VLSIT.1997.623683
Filename
623683
Link To Document