Title :
A micromachined vibrating rate gyroscope with independent beams for the drive and detection modes
Author :
Mochida, Y. ; Tamura, M. ; Ohwada, K.
Author_Institution :
Murata Mfg. Co. Ltd., Yokohama, Japan
Abstract :
We investigated the mechanical coupling between the drive and detection modes of micromachined vibrating rate gyroscopes, and designed and fabricated a gyroscope with a new structure to reduce the coupling. The coupling of the oscillator was measured using a new measurement system with a two-dimensional laser displacement meter. The oscillations were found to have an elliptical motion due to the coupling. When the frequency mismatch was reduced by means of electrostatic frequency tuning with a DC bias voltage, the coupling increased. The new structure, which has independent beams for the drive and detection modes, exhibited weaker coupling; and the resolution was 0.07 deg/sec at a bandwidth of 10 Hz.
Keywords :
Coriolis force; finite element analysis; gyroscopes; micromachining; micromechanical resonators; microsensors; tuning; 2D laser displacement meter; Coriolis force; DC bias voltage; FEA; SOI; comb electrodes; detection mode; drive mode; electrostatic frequency tuning; elliptical motion; frequency mismatch reduction; independent beams; mechanical coupling; micromachined vibrating rate gyroscope; oscillator coupling; resonant frequencies; Displacement measurement; Electrostatic measurements; Frequency; Gyroscopes; Laser beams; Laser modes; Laser tuning; Optical coupling; Oscillators; Voltage;
Conference_Titel :
Micro Electro Mechanical Systems, 1999. MEMS '99. Twelfth IEEE International Conference on
Conference_Location :
Orlando, FL, USA
Print_ISBN :
0-7803-5194-0
DOI :
10.1109/MEMSYS.1999.746899
