DocumentCode
2579088
Title
Accurate estimation of tip shape for reconstructing AFM image
Author
Yuan, Shuai ; Liu, Lianqing ; Miao, Lei ; Dong, Zaili ; Xi, Ning ; Wang, Yuechao
Author_Institution
State Key Lab. of Robot., Shenyang Inst. of Autom., Shenyang, China
fYear
2009
fDate
2-5 June 2009
Firstpage
96
Lastpage
99
Abstract
AFM image is often distorted due to the influence of the tip shape. This problem has become one of the major obstacles in nano-observation. Therefore it is necessary to develop a compensation method to improve the quality of the AFM image. The common used method today is image reconstruction with deconvolution operator based on the tip shape built through blind tip estimation algorithm. However, the current algorithm has difficulties in getting the optimal noise threshold, which is essential for reducing the noise influence during the tip evaluation. This paper proposed a new method to solve this problem, through which the optimal threshold can be easily determined based on the comparison of tip section profile Palpha and tip standard profile Ps. The experimental results validate the effect of the proposed method, and it also shows that the image quality has been greatly improved.
Keywords
atomic force microscopy; image reconstruction; nanotechnology; AFM image reconstruction; blind tip estimation algorithm; compensation method; deconvolution operator; nanoobservation; optimal noise threshold; tip shape; Biomedical measurements; Image reconstruction; Noise shaping; Pollution measurement; Robotics and automation; Semiconductor device noise; Shape; Surface morphology; Surface topography; USA Councils; AFM; Blind Tip Estimation; Math Morphology; Porous Aluminium;
fLanguage
English
Publisher
ieee
Conference_Titel
Nanotechnology Materials and Devices Conference, 2009. NMDC '09. IEEE
Conference_Location
Traverse City, MI
Print_ISBN
978-1-4244-4695-7
Electronic_ISBN
978-1-4244-4696-4
Type
conf
DOI
10.1109/NMDC.2009.5167574
Filename
5167574
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