• DocumentCode
    2579088
  • Title

    Accurate estimation of tip shape for reconstructing AFM image

  • Author

    Yuan, Shuai ; Liu, Lianqing ; Miao, Lei ; Dong, Zaili ; Xi, Ning ; Wang, Yuechao

  • Author_Institution
    State Key Lab. of Robot., Shenyang Inst. of Autom., Shenyang, China
  • fYear
    2009
  • fDate
    2-5 June 2009
  • Firstpage
    96
  • Lastpage
    99
  • Abstract
    AFM image is often distorted due to the influence of the tip shape. This problem has become one of the major obstacles in nano-observation. Therefore it is necessary to develop a compensation method to improve the quality of the AFM image. The common used method today is image reconstruction with deconvolution operator based on the tip shape built through blind tip estimation algorithm. However, the current algorithm has difficulties in getting the optimal noise threshold, which is essential for reducing the noise influence during the tip evaluation. This paper proposed a new method to solve this problem, through which the optimal threshold can be easily determined based on the comparison of tip section profile Palpha and tip standard profile Ps. The experimental results validate the effect of the proposed method, and it also shows that the image quality has been greatly improved.
  • Keywords
    atomic force microscopy; image reconstruction; nanotechnology; AFM image reconstruction; blind tip estimation algorithm; compensation method; deconvolution operator; nanoobservation; optimal noise threshold; tip shape; Biomedical measurements; Image reconstruction; Noise shaping; Pollution measurement; Robotics and automation; Semiconductor device noise; Shape; Surface morphology; Surface topography; USA Councils; AFM; Blind Tip Estimation; Math Morphology; Porous Aluminium;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Nanotechnology Materials and Devices Conference, 2009. NMDC '09. IEEE
  • Conference_Location
    Traverse City, MI
  • Print_ISBN
    978-1-4244-4695-7
  • Electronic_ISBN
    978-1-4244-4696-4
  • Type

    conf

  • DOI
    10.1109/NMDC.2009.5167574
  • Filename
    5167574