• DocumentCode
    2579094
  • Title

    Development of electron beam recorder with a /spl theta/-stage

  • Author

    Kojima, Y. ; Sato, M. ; Kasono, O. ; Katsumura, M. ; Iida, T.

  • Author_Institution
    Corporate Res. & Dev. Labs., Pioneer Corp., Saitama, Japan
  • fYear
    2003
  • fDate
    29-31 Oct. 2003
  • Firstpage
    164
  • Lastpage
    165
  • Abstract
    In this paper, outline of EBR and the results of circle patterning were reported. Electron beam recorder with the /spl theta/-stage had a promising ability for high accuracy recording.
  • Keywords
    electron beam applications; optical disc storage; recorders; /spl theta/-stage; circle pattern; electron beam recorder; ultra high-density recording; Acceleration; Convergence; Disk recording; Electron beams; Extraterrestrial measurements; Focusing; Lenses; Optical control; Particle beams; Structural beams;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microprocesses and Nanotechnology Conference, 2003. Digest of Papers. 2003 International
  • Conference_Location
    Tokyo, Japan
  • Print_ISBN
    4-89114-040-2
  • Type

    conf

  • DOI
    10.1109/IMNC.2003.1268627
  • Filename
    1268627
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2579094