Title :
New out-of-plane light attenuation scheme based on surface micromachined pop-up mirror and movement translation micromechanism
Author :
Chengkuo Lee ; Yu-Shen Lin ; Yen-Jyh Lai ; Ming Hung Tasi ; Chihchung Chen ; Chia-Yu Wu ; Ruey-Shing Huang
Author_Institution :
Asia Pacific Microsystems Inc., Hsinchu, Taiwan
Abstract :
In this paper we study a new out-of-plane light attenuation scheme based on a surface micromachined pop-up mirror and movement translation micromechanism. New movement translation micromechanism (MTM) is proposed to amplify small in-plane displacement into large out-plane rotation movement; this is needed to operate our new variable optical attenuator devices.
Keywords :
light transmission; micromirrors; optical attenuators; optical dispersion; displacement; light attenuation; movement translation micromechanism; out-plane rotation movement; surface micromachined pop-up mirror; variable optical attenuator devices; Actuators; Capacitors; Electrothermal effects; Insertion loss; Micromechanical devices; Mirrors; Optical attenuators; Optical coupling; Silicon; Voltage;
Conference_Titel :
Microprocesses and Nanotechnology Conference, 2003. Digest of Papers. 2003 International
Conference_Location :
Tokyo, Japan
Print_ISBN :
4-89114-040-2
DOI :
10.1109/IMNC.2003.1268631
