Title :
Bi-directional movable latched micromechanism using one-directional movable Chevron electrothermal actuators for switch and relay applications
Author :
Wen-Chih Chen ; Chia-Yu Wu ; Chengkuo Lee
Author_Institution :
Asia Pacific Microsystems Inc., Hsinchu, Taiwan
Abstract :
In this paper, we present a creative bi-directional movable latched micromechanism for switch and relay application. Bistable microelectromechanical (MEM) mechanisms provide two relative positions that are both mechanically stable. Preliminary results prove this new design is promising in optical switch application.
Keywords :
microactuators; microrelays; microswitches; MEMS; bidirectional movable latched micromechanism; one-directional movable Chevron electrothermal actuators; optical switch applications; relays; Asia; Bidirectional control; Electrostatic actuators; Electrothermal effects; Mirrors; Optical bistability; Optical switches; Relays; Research and development; Springs;
Conference_Titel :
Microprocesses and Nanotechnology Conference, 2003. Digest of Papers. 2003 International
Conference_Location :
Tokyo, Japan
Print_ISBN :
4-89114-040-2
DOI :
10.1109/IMNC.2003.1268634
