Title :
Increased emission efficiency of gated cold cathode with carbonic nano-pillars
Author :
Yoshida, Tomoya ; Baba, Akiyoshi ; Asano, Tanemasa
Author_Institution :
Center for Microelectron. Syst., Kyushu Inst. of Technol., Fukuoka, Japan
Abstract :
In this paper, we show that the adhesivity of the carbonic film to the substrate is very much improved by modifying the surface of the carbonic film with ion beam irradiation and the deformation of the gate electrode can be minimized. As a result, highly efficient electron-emission characteristic of the gated cold cathode with nano-pillars was demonstrated.
Keywords :
adhesion; carbon; cathodes; electron field emission; ion beam effects; nanostructured materials; phosphors; photoluminescence; plasma CVD; sputter etching; thin films; C; adhesivity; carbonic nanopillars; emission efficiency; gate electrode; gated cold cathode; ion beam irradiation; Apertures; Argon; Cathodes; Hafnium; Ion beams; Organic materials; Plasma applications; Plasma displays; Resists; Substrates;
Conference_Titel :
Microprocesses and Nanotechnology Conference, 2003. Digest of Papers. 2003 International
Conference_Location :
Tokyo, Japan
Print_ISBN :
4-89114-040-2
DOI :
10.1109/IMNC.2003.1268638
