Title :
Study on wet-etching of PZT thin film
Author :
Kelu Zheng ; Jian Lu ; Jiaru Chu
Author_Institution :
Dept. of Precision Machinery & Precision Instrum., Univ. of Sci. & Tech of China, Hefei, China
Abstract :
PZT thin films are promising materials for MEMS applications due to their good piezoelectric properties. In this paper, we investigated the mechanism of the PZT wet-etching and propose a modified wet-etching recipe (BHF:HCl:NH/sub 4/Cl:H/sub 2/O=1:2:4:4) to etch PZT thin films.
Keywords :
etching; lead compounds; micromechanical devices; piezoelectric materials; piezoelectric thin films; PZT; PZT thin film; PbZrO3TiO3; wet etching; Hafnium; Micromechanical devices; Piezoelectric films; Plasma applications; Plasma chemistry; Plasma properties; Resists; Transistors; Wet etching; X-ray scattering;
Conference_Titel :
Microprocesses and Nanotechnology Conference, 2003. Digest of Papers. 2003 International
Conference_Location :
Tokyo, Japan
Print_ISBN :
4-89114-040-2
DOI :
10.1109/IMNC.2003.1268739
