Title :
Fabrication of corrugated curved beam type electrostatic actuator and SDA driven self-assembling mechanism for VOA applications
Author :
Yen-Jyh Lai ; Chengkuo Lee ; Chia-Yu Wu ; Yu-Shen Lin ; Ming Hung Tasi ; Ruey-Shing Huang ; Min-Shyong Lin
Author_Institution :
Asia Pacific Microsyst. Inc., Hsinchu, Taiwan
Abstract :
In this paper, we present an innovative design of corrugated curved beam type electrostatic actuator with continuous motion capability, and SDA (scratch drive actuator) driven self-assembling mechanism for axial type MEMS VOA application.
Keywords :
electrostatic actuators; optical attenuators; self-assembly; MEMS variable optical attenuator; corrugated curved beam type electrostatic actuator; scratch drive actuator driven self-assembling mechanism; Assembly; Attenuation; Electrodes; Electrostatic actuators; Fabrication; Insertion loss; Micromechanical devices; Optical fiber devices; Residual stresses; Voltage;
Conference_Titel :
Microprocesses and Nanotechnology Conference, 2003. Digest of Papers. 2003 International
Conference_Location :
Tokyo, Japan
Print_ISBN :
4-89114-040-2
DOI :
10.1109/IMNC.2003.1268758
