Title :
Nano-technology in silicon foundries
Author_Institution :
Taiwan Semicond. Manuf. Co., Hsinchu, Taiwan
Abstract :
Foundry has been quietly manufacturing VLSI products based on today´s nano-scale transistors. Further scaling is becoming more and more challenging. There are lots of opportunities to collaborate between academia and Foundry to push the frontier nano-science research, so that more options become available to future scaling. New, none-IC materials and structures are being exploited for the continuation of scaling and new functions. Among these, a successful marriage of Si electronic devices and spintronics can bring in a new kind of memory device previously not available. It has been about 30 years of exciting evolution. It is expected that the next 30 years will be more exciting.
Keywords :
electron device manufacture; foundries; nanotechnology; silicon; VLSI products; memory device; nanoscale transistors; nanoscience research; nanotechnology; silicon foundries; spintronics; Art; Dielectric materials; Foundries; Manufacturing industries; Nanoscale devices; Physics; Semiconductor device manufacture; Silicon; Switches; Transistors;
Conference_Titel :
Emerging Information Technology Conference, 2005.
Print_ISBN :
0-7803-9328-7
DOI :
10.1109/EITC.2005.1544373
