Title :
Electrostatic inkjet head fabricated by anodization of Si
Author :
Ishida, Yuji ; Matsuzaki, Kazunari ; Baba, Akiyoshi ; Asano, Tanemasa
Author_Institution :
Kitakyushu Found. for the Adv. of Ind. Sci. & Technol., Japan
Abstract :
In this paper, we successfully fabricated the cone-shaped electrostatic inkjet head using anodization and demonstrated the droplet ejection from this head. The dot size was about 50 /spl mu/m in diameter and this value is much larger than that of expected. Optimization of head shape and driving method will enable us to obtain fine droplets.
Keywords :
anodisation; electrostatic devices; elemental semiconductors; silicon; 50 micron; Si; anodization; cone-shaped electrostatic inkjet head; droplet ejection; droplets; Annealing; Bonding; Conductivity; Electrodes; Electrostatics; Fabrication; Hafnium; Head; Ink; Materials science and technology;
Conference_Titel :
Microprocesses and Nanotechnology Conference, 2003. Digest of Papers. 2003 International
Conference_Location :
Tokyo, Japan
Print_ISBN :
4-89114-040-2
DOI :
10.1109/IMNC.2003.1268766
