Title :
A Monte Carlo calculation of secondary electron emission from organic compounds
Author :
Nobuo, T. ; Yasuda, M. ; Kawata, Hirotaka
Author_Institution :
Dept. of Phys. & Electron., Osaka Prefecture Univ., Sakai, Japan
Abstract :
In this article, we propose a Monte Carlo model of electron scattering in organic compounds and study the secondary electron emission from these materials.
Keywords :
Monte Carlo methods; polymers; secondary electron emission; Monte Carlo calculation; organic compounds; secondary electron emission; Electron emission; Energy loss; Fitting; Monte Carlo methods; Optical scattering; Organic compounds; Physics; Resists; Scanning electron microscopy; Semiconductor films;
Conference_Titel :
Microprocesses and Nanotechnology Conference, 2003. Digest of Papers. 2003 International
Conference_Location :
Tokyo, Japan
Print_ISBN :
4-89114-040-2
DOI :
10.1109/IMNC.2003.1268771
