DocumentCode
2581402
Title
A Monte Carlo calculation of secondary electron emission from organic compounds
Author
Nobuo, T. ; Yasuda, M. ; Kawata, Hirotaka
Author_Institution
Dept. of Phys. & Electron., Osaka Prefecture Univ., Sakai, Japan
fYear
2003
fDate
29-31 Oct. 2003
Firstpage
312
Lastpage
313
Abstract
In this article, we propose a Monte Carlo model of electron scattering in organic compounds and study the secondary electron emission from these materials.
Keywords
Monte Carlo methods; polymers; secondary electron emission; Monte Carlo calculation; organic compounds; secondary electron emission; Electron emission; Energy loss; Fitting; Monte Carlo methods; Optical scattering; Organic compounds; Physics; Resists; Scanning electron microscopy; Semiconductor films;
fLanguage
English
Publisher
ieee
Conference_Titel
Microprocesses and Nanotechnology Conference, 2003. Digest of Papers. 2003 International
Conference_Location
Tokyo, Japan
Print_ISBN
4-89114-040-2
Type
conf
DOI
10.1109/IMNC.2003.1268771
Filename
1268771
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