DocumentCode :
2581609
Title :
Fluorescence measurement of nanopillars fabricated by high aspect nanoprint technology
Author :
Kuwabara, K. ; Ogino, M. ; Motowaki, S. ; Miyauchi, A.
Author_Institution :
Hitachi Res. Lab., Hitachi Ltd., Japan
fYear :
2003
fDate :
29-31 Oct. 2003
Firstpage :
338
Lastpage :
339
Abstract :
In this paper, our aim is to form high aspect structures (nanopillars) by high aspect nanoprint (Hi-NP) technology.
Keywords :
fluorescence; nanolithography; nanostructured materials; polymer films; fluorescence; high aspect nanoprint technology; high aspect structure; nanopillars; soft lithography; Biological materials; DNA; Fluorescence; Laboratories; Large scale integration; Nanostructures; Proteins; Semiconductor device measurement; Soft lithography; Substrates;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Microprocesses and Nanotechnology Conference, 2003. Digest of Papers. 2003 International
Conference_Location :
Tokyo, Japan
Print_ISBN :
4-89114-040-2
Type :
conf
DOI :
10.1109/IMNC.2003.1268784
Filename :
1268784
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2581609
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