Title :
Performance optimization of surface acoustic wave chemical sensors
Author :
McGill, R. Andrew ; Chrisey, Douglas B. ; Mlsna, Todd E. ; Stepnowski, Jennifer L. ; Chung, Russell ; Cotal, Hector
Author_Institution :
Naval Res. Lab., Washington, DC, USA
Abstract :
Surface acoustic wave (SAW) devices coated with a thin layer of chemoselective material provide highly sensitive chemical sensors for the detection and monitoring of vapors and gases. In this work, a variety of coating materials and coating deposition techniques have been evaluated on SAW devices. A new technique, matrix assisted pulsed laser embossing, is utilized to deposit polymer films on SAW devices, and conventional pulsed laser deposition is used to deposit a passivation layer of diamond-like-carbon on a SAW device surface. Both the electrical characteristics and the performance of the prepared devices against different gases have been determined
Keywords :
chemisorption; gas sensors; passivation; polymer films; pulsed laser deposition; surface acoustic wave sensors; MAPLE; SAW devices; chemoselective material; coating deposition; coating materials; detection; diamond-like-carbon; electrical characteristics; gas sensor; monitoring; passivation layer; performance optimization; polymer films; pulsed laser deposition; pulsed laser embossing; surface acoustic wave chemical sensors; thin layer; vapors; Acoustic waves; Chemical sensors; Coatings; Gases; Optical materials; Optical pulses; Optimization; Pulsed laser deposition; Surface acoustic wave devices; Surface acoustic waves;
Conference_Titel :
Frequency Control Symposium, 1997., Proceedings of the 1997 IEEE International
Conference_Location :
Orlando, FL
Print_ISBN :
0-7803-3728-X
DOI :
10.1109/FREQ.1997.638535
