• DocumentCode
    2583519
  • Title

    Channel Profile Control Based On Transient-enhanced-diffusion Suppression By RTA For 0.18 /spl mu/m Single Gate CMOS

  • Author

    Furukawa, A. ; Teramoto, A. ; Shimizu, S. ; Abe, Y. ; Tokuda, Y.

  • Author_Institution
    ULSI Laboratory, Mitsubishi Electric Corporation 4-1, Mizuhara, Itami, Hyogo 664, Japan
  • fYear
    1997
  • fDate
    10-12 June 1997
  • Firstpage
    87
  • Lastpage
    88
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    VLSI Technology, 1997. Digest of Technical Papers., 1997 Symposium on
  • Print_ISBN
    4-930813-75-1
  • Type

    conf

  • DOI
    10.1109/VLSIT.1997.623708
  • Filename
    623708
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2583519