Nanorobotic transfer and characterization of graphene flakes

This paper presents a nanorobotic approach facilitating the transfer and characterization of individual graphene flakes that are grown by different fabrication techniques. The approach makes use of a nanorobotic atomic force microscope system that is integrated into a high resolution scanning electron microscope and focused ion beam device. This combination is used to perform both, the nanorobotic transfer and the mechanical characterization of the graphene flake allowing to systematically analyze different sample areas and to optimize the fabrication processes. Furthermore, the nanorobotic system enables the reliable pick-and-place handling and processing of graphene flakes to realize more comprehensive analysis steps or even the prototyping of graphene-based devices.