DocumentCode

2584123

Title

An Advanced Ge Pre-amorphization Salicide Technology For Sub-quarter-micrometer SOI CMOS Devices

Author

Hsiao, T.C. ; Ping Liu ; Woo, J.C.S.

Author_Institution

Department of Electrical Engineering, University of California, Los Angeles, CA 90095-1594

fYear

1997

fDate

10-12 June 1997

Firstpage

95

Lastpage

96

fLanguage

English

Publisher

ieee

Conference_Titel

VLSI Technology, 1997. Digest of Technical Papers., 1997 Symposium on

Print_ISBN

4-930813-75-1

Type

conf

DOI

10.1109/VLSIT.1997.623712

Filename

623712