Title :
Polarimetric Michelson interferometer for sub-nanometric scale positionning control
Author :
Xu, Suan ; Chassagne, Luc ; Topcu, Suat ; Alayli, Yasser ; Juncar, Patrick
Author_Institution :
LISV, Univ. of Versailles St.-Quentin en Yvelines, Versailles, France
Abstract :
Step by step displacements control scheme based on polarimetric interferometer is proposed. A repeatability of 470 pm is obtained on back and forth displacements over micrometer range using piezoelectric actuators. The error induced on the position due to a residual ellipticity of the laser beam is investigated. Such method could be extended over millimeter range displacements leading to numerous applications in nanometrology.
Keywords :
Michelson interferometers; laser beams; piezoelectric actuators; position control; displacements control scheme; laser beam; nanometrology; piezoelectric actuators; polarimetric Michelson interferometer; subnanometric scale positioning control; Displacement control; Laser beams; Metrology; Mirrors; Optical interferometry; Optical polarization; Photodetectors; Piezoelectric actuators; Position control; Signal processing; Dimensional metrology; Homodyne interferometer; Nanometrology; Polarimeter;
Conference_Titel :
EUROCON 2009, EUROCON '09. IEEE
Conference_Location :
St.-Petersburg
Print_ISBN :
978-1-4244-3860-0
Electronic_ISBN :
978-1-4244-3861-7
DOI :
10.1109/EURCON.2009.5167926
