DocumentCode
2585100
Title
Polarimetric Michelson interferometer for sub-nanometric scale positionning control
Author
Xu, Suan ; Chassagne, Luc ; Topcu, Suat ; Alayli, Yasser ; Juncar, Patrick
Author_Institution
LISV, Univ. of Versailles St.-Quentin en Yvelines, Versailles, France
fYear
2009
fDate
18-23 May 2009
Firstpage
2029
Lastpage
2033
Abstract
Step by step displacements control scheme based on polarimetric interferometer is proposed. A repeatability of 470 pm is obtained on back and forth displacements over micrometer range using piezoelectric actuators. The error induced on the position due to a residual ellipticity of the laser beam is investigated. Such method could be extended over millimeter range displacements leading to numerous applications in nanometrology.
Keywords
Michelson interferometers; laser beams; piezoelectric actuators; position control; displacements control scheme; laser beam; nanometrology; piezoelectric actuators; polarimetric Michelson interferometer; subnanometric scale positioning control; Displacement control; Laser beams; Metrology; Mirrors; Optical interferometry; Optical polarization; Photodetectors; Piezoelectric actuators; Position control; Signal processing; Dimensional metrology; Homodyne interferometer; Nanometrology; Polarimeter;
fLanguage
English
Publisher
ieee
Conference_Titel
EUROCON 2009, EUROCON '09. IEEE
Conference_Location
St.-Petersburg
Print_ISBN
978-1-4244-3860-0
Electronic_ISBN
978-1-4244-3861-7
Type
conf
DOI
10.1109/EURCON.2009.5167926
Filename
5167926
Link To Document