Title :
Power handling and intermodulation distortion of contour-mode AlN MEMS resonators and filters
Author :
Nordquist, Christopher D. ; Olsson, Roy H., III
Author_Institution :
Sandia Nat. Labs., Albuquerque, NM, USA
Abstract :
We report measurements of the power handling and intermodulation distortion of piezoelectric contour mode resonators and filters operating near 500 MHz. The output power capability scales as the inverse of the motional impedance squared, and the power handling of resonator filter circuits scales with the number of resonators combined in series and parallel. Also, the third-order intercept depends on the measurement tone spacing. Individual AlN resonators with 50 Ω motional impedance demonstrate output power capability of +10 dBm and OIP3 >; +20 dBm, while an eight resonator filter demonstrates output power handling of +14 dBm and a OIP3 >; +32 dBm.
Keywords :
aluminium compounds; intermodulation distortion; microcavities; micromechanical resonators; piezoelectric devices; resonator filters; AlN; intermodulation distortion; motional impedance squared; piezoelectric contour-mode MEMS resonators; power handling; resistance 50 ohm; resonator filter circuits; third-order intercept; Filter banks; Impedance; Optical filters; Optical resonators; Power generation; Resonant frequency; Resonator filters; Resonator Filters; intermodulation distortion; piezoelectric devices; radiofrequency microelectromechanical systems;
Conference_Titel :
Microwave Symposium Digest (MTT), 2011 IEEE MTT-S International
Conference_Location :
Baltimore, MD
Print_ISBN :
978-1-61284-754-2
Electronic_ISBN :
0149-645X
DOI :
10.1109/MWSYM.2011.5972814
