Behavioral Modelling of Vibrating Piezoelectric Micro-Gyro Sensor and Detection Electronics

This paper describes the development of a model of vibrating piezoelectric micro-gyro sensor using analog hardware description. Our procedure implies several steps with emphasis in model complexity reduction and identification of critical parameters. The proposed macro-model permits multi-physic simulations including mechanical, piezo-electric and electrical analytic descriptions and allows a top-down development approach. As a tool for coding our descriptions, we use analog hardware description language (Verilog-A). For achieving the behavioural computation results, CADENCE simulation environment was used. The critical parameters of the gyro are then studied: the output noise, the output bias and scale factor stability over temperature.