Title :
The BGK kinetic model applied to the analysis of gas-structure interactions in MEMS
Author :
Frangi, Attilio ; Ghisi, Aldo
Author_Institution :
Politec. di Milano, Milan
Abstract :
The BGK model of the Boltzmann equation is applied to the analysis of damping in silicon inertial MEMS working at low-moderate frequencies. Assuming small perturbations, the linearised steady-state 2D equation is implemented in a deterministic manner in order to avoid noise intrinsic in statistical approaches. Implementation details are discussed and the comparison with available experimental data in terms of forces exerted on the suspended shuttle is presented.
Keywords :
Boltzmann equation; damping; elemental semiconductors; micromechanical devices; rarefied fluid dynamics; silicon; BGK kinetic model; Boltzmann equation; Si; damping analysis; gas-structure interaction; linearised steady-state 2D equation; rarefied monatomic gas flow; silicon inertial MEMS; suspended shuttle; Boltzmann equation; Damping; Distribution functions; Fluid flow; Frequency; Integral equations; Kinetic theory; Micromechanical devices; Silicon; Viscosity;
Conference_Titel :
Thermal, Mechanical and Multi-Physics Simulation Experiments in Microelectronics and Micro-Systems, 2007. EuroSime 2007. International Conference on
Conference_Location :
London
Print_ISBN :
1-4244-1105-X
Electronic_ISBN :
1-4244-1106-8
DOI :
10.1109/ESIME.2007.360053
