DocumentCode :
2586817
Title :
Impact Of Trench Sidewall Interface Trap In Shallow Trench Isolation On Junction Leakage Current Characteristics For Sub-0.25 /spl mu/m CMOS Devices
Author :
Inaba, S. ; Takahashi, M. ; Okayama, Y. ; Yagishita, A. ; Matsuoka, F. ; Ishiuchi, H.
fYear :
1997
fDate :
10-12 June 1997
Firstpage :
119
Lastpage :
120
fLanguage :
English
Publisher :
ieee
Conference_Titel :
VLSI Technology, 1997. Digest of Technical Papers., 1997 Symposium on
Print_ISBN :
4-930813-75-1
Type :
conf
DOI :
10.1109/VLSIT.1997.623727
Filename :
623727
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2586817
