Very high-Q solenoid RF inductors for SiP LTCC integration

Author

Aliouane, Said ; Kouki, Ammar B. ; Aigner, Robert

Author_Institution

Microelectron. & Commun. Lab. (LACIME), Montréal, QC, Canada

fYear

2011

fDate

5-10 June 2011

Firstpage

1

Lastpage

4

Abstract

Design and fabrication of radio frequency (RF) inductors in multi-layer Low Temperature Co-fired Ceramic (LTCC) materials are discussed and experimental results are presented. Compact high-Q three-dimensional inductor topologies have been designed to achieve high quality factor (Q>;75) and high self-resonance frequency (SRF >; 4.5 GHz) with inductance-value between 2-7 nH at 2 GHz. The inductors were made using the lowest possible number of LTCC layers and fine line LTCC process (width/space 2 mil/2 mil). The fabricated LTCC inductors are suitable for RF system-on-package (SiP) applications that require high Q factors.

Keywords

ceramic packaging; inductors; solenoids; system-in-package; LTCC inductors; RF system-on-package application; SiP LTCC integration; frequency 2 GHz; high-Q solenoid RF inductors; high-g three-dimensional inductor topology; multilayer low temperature co-fired ceramic materials; Inductance; Inductors; Q factor; Radio frequency; Resonant frequency; Solenoids; Spirals; Inductors; LTCC; quality factor; system in package;

fLanguage

English

Publisher

ieee

Conference_Titel

Microwave Symposium Digest (MTT), 2011 IEEE MTT-S International

Conference_Location

Baltimore, MD

ISSN

0149-645X

Print_ISBN

978-1-61284-754-2

Electronic_ISBN

0149-645X

Type

conf

DOI

10.1109/MWSYM.2011.5972902

Filename

5972902