Title :
Very high-Q solenoid RF inductors for SiP LTCC integration
Author :
Aliouane, Said ; Kouki, Ammar B. ; Aigner, Robert
Author_Institution :
Microelectron. & Commun. Lab. (LACIME), Montréal, QC, Canada
Abstract :
Design and fabrication of radio frequency (RF) inductors in multi-layer Low Temperature Co-fired Ceramic (LTCC) materials are discussed and experimental results are presented. Compact high-Q three-dimensional inductor topologies have been designed to achieve high quality factor (Q>;75) and high self-resonance frequency (SRF >; 4.5 GHz) with inductance-value between 2-7 nH at 2 GHz. The inductors were made using the lowest possible number of LTCC layers and fine line LTCC process (width/space 2 mil/2 mil). The fabricated LTCC inductors are suitable for RF system-on-package (SiP) applications that require high Q factors.
Keywords :
ceramic packaging; inductors; solenoids; system-in-package; LTCC inductors; RF system-on-package application; SiP LTCC integration; frequency 2 GHz; high-Q solenoid RF inductors; high-g three-dimensional inductor topology; multilayer low temperature co-fired ceramic materials; Inductance; Inductors; Q factor; Radio frequency; Resonant frequency; Solenoids; Spirals; Inductors; LTCC; quality factor; system in package;
Conference_Titel :
Microwave Symposium Digest (MTT), 2011 IEEE MTT-S International
Conference_Location :
Baltimore, MD
Print_ISBN :
978-1-61284-754-2
Electronic_ISBN :
0149-645X
DOI :
10.1109/MWSYM.2011.5972902
