Title :
Measurement of Dynamic Properties of MEMS and the Possibilities of Parameter Identification by Simulation
Author :
Ebert, Matthias ; Naumann, Falk ; Gerbach, Ronny ; Bagdahn, Joerg
Author_Institution :
Fraunhofer Inst. for Mech. of Mater., Halle
Abstract :
In the paper basic investigations for the nondestructive quality testing methods for MEMS (micro-electro- mechanical systems) are presented that can be applied on wafer level in early stage of the manufacturing process. The dynamic measurements of test specimen are performed by laser-Doppler-vibrometry (LDV). Finite element (FE) models with different specifications are created to identify parameters from the measured eigenfrequency values. Different aspects of the numerical results and of experimental investigations of dynamic properties are presented for pressure sensor test structures. Results of identification of one and more parameters are shown.
Keywords :
microsensors; nondestructive testing; pressure sensors; MEMS; dynamic properties; eigenfrequency; finite element models; laser-Doppler-vibrometry; microelectromechanical systems; nondestructive quality testing; pressure sensor; Finite element methods; Laser modes; Manufacturing processes; Mechanical systems; Micromechanical devices; Nondestructive testing; Parameter estimation; Performance evaluation; Semiconductor device modeling; System testing;
Conference_Titel :
Thermal, Mechanical and Multi-Physics Simulation Experiments in Microelectronics and Micro-Systems, 2007. EuroSime 2007. International Conference on
Conference_Location :
London
Print_ISBN :
1-4244-1105-X
Electronic_ISBN :
1-4244-1106-8
DOI :
10.1109/ESIME.2007.360061
