Measurement of Dynamic Properties of MEMS and the Possibilities of Parameter Identification by Simulation

Author

Ebert, Matthias ; Naumann, Falk ; Gerbach, Ronny ; Bagdahn, Joerg

Author_Institution

Fraunhofer Inst. for Mech. of Mater., Halle

fYear

2007

fDate

16-18 April 2007

Firstpage

1

Lastpage

6

Abstract

In the paper basic investigations for the nondestructive quality testing methods for MEMS (micro-electro- mechanical systems) are presented that can be applied on wafer level in early stage of the manufacturing process. The dynamic measurements of test specimen are performed by laser-Doppler-vibrometry (LDV). Finite element (FE) models with different specifications are created to identify parameters from the measured eigenfrequency values. Different aspects of the numerical results and of experimental investigations of dynamic properties are presented for pressure sensor test structures. Results of identification of one and more parameters are shown.

Keywords

microsensors; nondestructive testing; pressure sensors; MEMS; dynamic properties; eigenfrequency; finite element models; laser-Doppler-vibrometry; microelectromechanical systems; nondestructive quality testing; pressure sensor; Finite element methods; Laser modes; Manufacturing processes; Mechanical systems; Micromechanical devices; Nondestructive testing; Parameter estimation; Performance evaluation; Semiconductor device modeling; System testing;

fLanguage

English

Publisher

ieee

Conference_Titel

Thermal, Mechanical and Multi-Physics Simulation Experiments in Microelectronics and Micro-Systems, 2007. EuroSime 2007. International Conference on

Conference_Location

London

Print_ISBN

1-4244-1105-X

Electronic_ISBN

1-4244-1106-8

Type

conf

DOI

10.1109/ESIME.2007.360061

Filename

4201228