Title :
Terahertz micromachined on-wafer probes: Repeatability and robustness
Author :
Chen, Lihan ; Zhang, Chunhu ; Reck, Theodore J. ; Groppil, Christopher ; Arsenovic, Alex ; Lichtenberger, Arthur ; Weikle, Robert M. ; Barker, N. Scott
Author_Institution :
Charles L. Brown Dept. of Electr. Eng., Univ. of Virginia, Charlottesville, VA, USA
Abstract :
Although progress has been made in the development of submillimeter-wave monolithic integrated circuits, the evaluation of these circuits still relies on test fixtures, which makes testing expensive and time consuming. Based on a W-band prototype, a micromachined on-wafer probe covering frequencies 500-750 GHz is built to simplify submillimeter-wave integrated circuits testing. This paper demonstrates the repeatability and the robustness of this terahertz micromachined on-wafer probe.
Keywords :
integrated circuit testing; probes; submillimetre wave integrated circuits; W-band prototype; frequency 500 GHz to 750 GHz; submillimeter-wave monolithic integrated circuit development; submillimeter-wave monolithic integrated circuit testing; terahertz micromachined on-wafer probes; Calibration; Coplanar waveguides; Force; Manganese; Probes; Semiconductor device measurement; Silicon; Micromachined; On-wafer probe; Reliability; Terahertz;
Conference_Titel :
Microwave Symposium Digest (MTT), 2011 IEEE MTT-S International
Conference_Location :
Baltimore, MD
Print_ISBN :
978-1-61284-754-2
Electronic_ISBN :
0149-645X
DOI :
10.1109/MWSYM.2011.5972907
