Terahertz micromachined on-wafer probes: Repeatability and robustness

Author

Chen, Lihan ; Zhang, Chunhu ; Reck, Theodore J. ; Groppil, Christopher ; Arsenovic, Alex ; Lichtenberger, Arthur ; Weikle, Robert M. ; Barker, N. Scott

Author_Institution

Charles L. Brown Dept. of Electr. Eng., Univ. of Virginia, Charlottesville, VA, USA

fYear

2011

fDate

5-10 June 2011

Firstpage

1

Lastpage

4

Abstract

Although progress has been made in the development of submillimeter-wave monolithic integrated circuits, the evaluation of these circuits still relies on test fixtures, which makes testing expensive and time consuming. Based on a W-band prototype, a micromachined on-wafer probe covering frequencies 500-750 GHz is built to simplify submillimeter-wave integrated circuits testing. This paper demonstrates the repeatability and the robustness of this terahertz micromachined on-wafer probe.

Keywords

integrated circuit testing; probes; submillimetre wave integrated circuits; W-band prototype; frequency 500 GHz to 750 GHz; submillimeter-wave monolithic integrated circuit development; submillimeter-wave monolithic integrated circuit testing; terahertz micromachined on-wafer probes; Calibration; Coplanar waveguides; Force; Manganese; Probes; Semiconductor device measurement; Silicon; Micromachined; On-wafer probe; Reliability; Terahertz;

fLanguage

English

Publisher

ieee

Conference_Titel

Microwave Symposium Digest (MTT), 2011 IEEE MTT-S International

Conference_Location

Baltimore, MD

ISSN

0149-645X

Print_ISBN

978-1-61284-754-2

Electronic_ISBN

0149-645X

Type

conf

DOI

10.1109/MWSYM.2011.5972907

Filename

5972907