Force sensing using artificial magnetic cilia

This paper proposes a sensing concept based on measuring the geometrical deformation of artificial magnetic cilia indirectly with a magnetoresistive sensor. The cilia are fabricated with a template-free method based on the evaporation of solvent from a suspension containing micron-sized magnetic particles and dissolved elastomeric polymers under constant magnetic field. The sensing concept has applications in e.g. flow measurement and tactile force sensing. A mathematical model for the magnetic field of the cilium is developed and experimental results are presented to verify the model.