DocumentCode

2587782

Title

Fabrication Of 100 nm pMOSFETS With Hybrid AFW / STM Lithography

Author

Sob ; Wilder, K. ; Atalar, A. ; Quate, C.F.

Author_Institution

E. L. Ginzton Laboratory, Stanford University, Stanford, CA 94305-4085, U.S.A.

fYear

1997

fDate

10-12 June 1997

Firstpage

129

Lastpage

130

fLanguage

English

Publisher

ieee

Conference_Titel

VLSI Technology, 1997. Digest of Technical Papers., 1997 Symposium on

Print_ISBN

4-930813-75-1

Type

conf

DOI

10.1109/VLSIT.1997.623732

Filename

623732