• DocumentCode
    2588321
  • Title

    Ultra-thin Ta/sub 2/O/sub 5/SiO/sub 2/ gate insulator with TiN gate technology for 0.1/spl mu/m MOSFETs

  • Author

    Momiyama, Y. ; Minakata, H. ; Sugii, T.

  • Author_Institution
    Fujitsu Laboratories Ltd., 10-1 Morinosato-Wakamiya, Atsugi 243-01, Japan
  • fYear
    1997
  • fDate
    10-12 June 1997
  • Firstpage
    135
  • Lastpage
    136
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    VLSI Technology, 1997. Digest of Technical Papers., 1997 Symposium on
  • Print_ISBN
    4-930813-75-1
  • Type

    conf

  • DOI
    10.1109/VLSIT.1997.623735
  • Filename
    623735
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2588321