Design and fabrication of two-pole monolithic bulk acoustic filters

Author

Rosenbaum, J. ; Dawson, D.

Author_Institution

Westinghouse ATL, Baltimore, MD, USA

fYear

1990

fDate

7-8 May 1990

Firstpage

63

Lastpage

66

Abstract

A new class of miniature monolithic filters has been fabricated in the 1-GHz to 1.5-GHz range. The devices are two-pole ladder filters which incorporate two inductors, a coupling capacitor, and two bulk acoustic resonators. They are characterized by small size and weight, low insertion loss (typically between 1 and 1.5 dB), narrow passbands (between 2 and 5%), and potentially very low cost. Filters have been fabricated on both high-resistivity silicon and semiinsulating gallium arsenide substrates. Fabrication is completely compatible with all monolithic microwave IC components, and thus integrating these devices with active components on the same wafer is a straightforward procedure.<>

Keywords

MMIC; acoustic filters; crystal filters; crystal resonators; ladder networks; microwave filters; passive filters; radiofrequency filters; 1 to 1.5 GHz; 1 to 1.5 dB; MMIC compatible devices; UHF; bulk acoustic resonators; coupling capacitor; fabrication; high-resistivity Si substrate; inductors; insertion loss; miniature monolithic filters; monolithic bulk acoustic filters; semiinsulating GaAs substrate; two-pole filters; two-pole ladder filters; Acoustic devices; Capacitors; Costs; Fabrication; Inductors; Insertion loss; Microwave filters; Passband; Resonator filters; Silicon;

fLanguage

English

Publisher

ieee

Conference_Titel

Microwave and Millimeter-Wave Monolithic Circuits Symposium, 1990. Digest of Papers., IEEE 1990

Conference_Location

Dallas, TX, USA

Type

conf

DOI

10.1109/MCS.1990.110940

Filename

110940