Title :
Energy funnels - A new oxide breakdown model
Author :
Cheung, K.P. ; Colonell, J.I. ; Chang, C.P. ; Lai, W.Y.C. ; Liu, C.T. ; Liu, R. ; Pai, C.S.
Author_Institution :
Lucent Technologies, Bell Laboratories, Murray Hill, NJ 07974, U.S.A
Abstract :
Stress induced leakage current (SILC) and soft breakdown (SBD) are current hot topics[l,2] in thin gate-oxide reliability. We wish to report here some new experimental observations and to propose a new model for trap assisted tunneling (TAT), SBD and Hard breakdown (HBD).
Keywords :
Antenna measurements; Energy management; Modeling; Stress analysis;
Conference_Titel :
VLSI Technology, 1997. Digest of Technical Papers., 1997 Symposium on
Print_ISBN :
4-930813-75-1
DOI :
10.1109/VLSIT.1997.623740
