RF MEMS and its Applications in Microwaves and Millimeter Waves

RF MEMS devices utilized micromachining technologies offer a high performance to several RF applications. They receive increasingly attentions in microwave researchers and engineers in the recent years. This paper includes two parts. In the first part, a brief review of RF MEMS is presented. In the second part, some research work of the author´s group on RF MEMS technology is introduced.