Title :
Fabrication of surface acoustic wave wireless pressure sensor
Author :
Hermelin, D. ; Daniaux, W. ; Ballandras, S. ; Belgacem, B.
Author_Institution :
Dept Temps-Frequence, FEMTO-ST, Besancon, France
Abstract :
This paper deals with walk-through allowing to explain the electrical response of a surface acoustic wave (SAW) resonator under inhomogeneous stress. Act of pressure on a circular membrane where is put the resonator induces inhomogeneous stress and changes the resonance frequency and the quality factor of the resonator. This paper describes a developed model based on P-matrix approach allowing to explain the behavior of these two parameters.
Keywords :
Q-factor; electric impedance; matrix algebra; pressure sensors; resonance; stress analysis; surface acoustic wave resonators; P-matrix; SAW resonator; circular membrane; electrical impedance; electrical response; inhomogeneous stress; quality factor; resonance frequency; surface acoustic wave resonator; wireless pressure sensor; Acoustic sensors; Acoustic waves; Biomembranes; Fabrication; Resonance; Resonant frequency; Response surface methodology; Stress; Surface acoustic waves; Wireless sensor networks; SAW resonator; component; electrical impedance; inhomogeneous stress distribution; pressure sensor; quality factor;
Conference_Titel :
Frequency Control Symposium, 2009 Joint with the 22nd European Frequency and Time forum. IEEE International
Conference_Location :
Besancon
Print_ISBN :
978-1-4244-3511-1
Electronic_ISBN :
1075-6787
DOI :
10.1109/FREQ.2009.5168149
