Progress Report on a Study of the Primary Modes of Failure Occurring at Material Interfaces Found in Thin-Film Solid State Devices

Author

Greenough, Kenneth F.

Author_Institution

Solid State Division, Motorola, Inc.

fYear

1962

fDate

Sept. 1962

Firstpage

Lastpage

Keywords

Aluminum; Capacitance; Chromium; Dielectric thin films; Electrodes; Gold; Silver; Solid state circuits; Testing; Thin film devices;

fLanguage

English

Publisher

ieee

Conference_Titel

Physics of Failure in Electronics, 1962. First Annual Symposium on the

Conference_Location

Chicago, IL, USA

ISSN

0097-2088

Type

DOI

10.1109/IRPS.1962.359981

Filename

4201987

Link To Document