Title :
Progress Report on a Study of the Primary Modes of Failure Occurring at Material Interfaces Found in Thin-Film Solid State Devices
Author :
Greenough, Kenneth F.
Author_Institution :
Solid State Division, Motorola, Inc.
Keywords :
Aluminum; Capacitance; Chromium; Dielectric thin films; Electrodes; Gold; Silver; Solid state circuits; Testing; Thin film devices;
Conference_Titel :
Physics of Failure in Electronics, 1962. First Annual Symposium on the
Conference_Location :
Chicago, IL, USA
DOI :
10.1109/IRPS.1962.359981
