Self heating under RF power in BAW SMR and its predictive 1D thermal model

Author

Hassine, N.B. ; Mercier, D. ; Renaux, P. ; Bloch, D. ; Parat, G. ; Ivira, B. ; Waltz, P. ; Chappaz, C. ; Fillit, R. ; Basrour, S.

Author_Institution

STMicroelectronics, Crolles, France

fYear

2009

fDate

20-24 April 2009

Firstpage

237

Lastpage

240

Abstract

This paper intends to provide a contribution for a better understanding of the self-heating effect in BAW SMR by developing a predictive 1D-model. Knowing the power dissipated inside the SMR, the presented model allows us estimating the temperature distribution inside the different layers of resonators used to build BAW filters. Model is compared with both experimental measurements and Finite Elements Analysis. Conclusions concerning the device reliability can eventually be drawn.

Keywords

acoustic filters; bulk acoustic wave devices; finite element analysis; reliability; surface acoustic wave resonators; temperature distribution; BAW filters; RF power; SMR; device reliability; finite elements analysis; predictive 1D thermal model; resonators; self heating; temperature distribution; Acoustic measurements; Acoustic reflection; Acoustic waves; Finite element methods; Heating; Predictive models; Radio frequency; Resonator filters; Temperature distribution; Thermal resistance;

fLanguage

English

Publisher

ieee

Conference_Titel

Frequency Control Symposium, 2009 Joint with the 22nd European Frequency and Time forum. IEEE International

Conference_Location

Besancon

ISSN

1075-6787

Print_ISBN

978-1-4244-3511-1

Electronic_ISBN

1075-6787

Type

conf

DOI

10.1109/FREQ.2009.5168176

Filename

5168176