Title :
A study on gas sensors using a SAW device
Author :
Sugiyama, Katutoshi ; Saeki, Katsutoshi ; Nihon, Minoru Saito ; Sekine, Yoshifumi
Author_Institution :
Sch. of Sci. & Technol., Nihon Univ. Grad., Funabashi, Japan
Abstract :
When an open type stove is used indoors, NO2 is generated by the combustion of the fuel, which can lead to respiratory diseases or allergic reactions. In addition, SO2 is also generated by the combustion of fossil fuels, which can cause asthma and bronchitis. In this paper, we propose a sensor, which uses a SAW device coated with Cu and Zn phthalocyanine films, for measuring the concentrations of NO2 and SO2. We have demonstrated that NO2 and SO2 concentrations in the 0.3-0.5 ppm range can be measured in a mixed gas containing a NO2 and SO2 by using sensors coated with 400 nm thick Cu phthalocyanine and 50 nm thick Zn phthalocyanine films, respectively. Furthermore, a multi sensor incorporating patterned Zn and Cu phthalocyanine films, capable of measuring the concentrations of both N02 and S02 has been demonstrated.
Keywords :
chemical variables measurement; combustion; copper compounds; fossil fuels; gas mixtures; gas sensors; nitrogen compounds; organic compounds; sulphur compounds; surface acoustic wave sensors; thin film sensors; zinc compounds; NO2; SAW device; SO2; allergic reactions; asthma; bronchitis; fossil fuels combustion; gas concentrations measurement; open type stove; phthalocyanine films; respiratory diseases; size 400 nm; size 50 nm; Calibration; Films; Insertion loss; Loss measurement; Surface acoustic wave devices; Surface acoustic waves; Zinc; Copper Phthalocyanine Zinc Phthalocyanine; NO2; SAWSensor; SO2;
Conference_Titel :
Circuits and Systems (APCCAS), 2014 IEEE Asia Pacific Conference on
Conference_Location :
Ishigaki
DOI :
10.1109/APCCAS.2014.7032818
