• DocumentCode
    2591575
  • Title

    Fabrication Techniques for X-Band Monolithic VCOs

  • Author

    Brehm, G.E. ; Scott, B.N. ; Doerbeck, F.H.

  • Volume
    82
  • Issue
    1
  • fYear
    1982
  • fDate
    30103
  • Firstpage
    57
  • Lastpage
    60
  • Abstract
    Monolithic GaAs FET VCOs have been designed and fabricated utilizing a submicron-gate FET, wide-capacitance-ratio varactor diodes, MIM capacitors, microstripline inductors, resistors and air-bridge interconnections on a single GaAs chip. Design considerations and fabrication techniques for each of these components are given.
  • Keywords
    Anodes; Circuits; Diodes; FETs; Fabrication; Fingers; Gallium arsenide; Inductors; Varactors; Voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microwave and Millimeter-Wave Monolithic Circuits
  • Type

    conf

  • DOI
    10.1109/MCS.1982.1112182
  • Filename
    1112182
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2591575