Title :
Predictive spiral inductor compact model for frequency and time domain
Author :
Tiemeijer, L.F. ; Havens, R.J. ; de Kort, R. ; Bouttement, Y. ; Deixler, P. ; Ryczek, M.
Author_Institution :
Philips Res. Labs., Eindhoven, Netherlands
Abstract :
A highly accurate predictive inductor model for integrated symmetric inductors with center tap and patterned ground shield is presented. This model is based on a modified Greenhouse algorithm where current crowding due to skin and proximity effects is included by considering the spread in parallel sub-loop inductances. This scalable symmetrical inductor equivalent circuit model covers all operating conditions, and yet only requires dimensions and back-end layer thicknesses. We have verified this scalable model for a large number of inductors from three industrial IC processes and found excellent agreement with measured inductances, Q-factors, and resonance frequencies.
Keywords :
Q-factor; equivalent circuits; inductors; skin effect; Greenhouse algorithm; Q-factor; center tap inductors; current crowding; frequency domain analysis; integrated symmetric inductors; parallel sub-loop inductance spread; patterned ground shield; predictive spiral inductor compact model; proximity effects; resonance frequency; scalable equivalent circuit model; skin effects; time domain analysis; Equivalent circuits; Frequency measurement; Inductors; Integrated circuit modeling; Predictive models; Proximity effect; Q factor; Resonance; Skin; Spirals;
Conference_Titel :
Electron Devices Meeting, 2003. IEDM '03 Technical Digest. IEEE International
Conference_Location :
Washington, DC, USA
Print_ISBN :
0-7803-7872-5
DOI :
10.1109/IEDM.2003.1269418
