Framework for a defect reduction program

Author

Duffy, Brian ; Cumming, George ; Fletcher, David

Author_Institution

Digital Equipment Corp., Hudson, MA, USA

fYear

1990

fDate

11-12 Sep 1990

Firstpage

77

Lastpage

81

Abstract

A framework for defect reduction is presented which integrates management commitment, a focused organizational structure, state-of-the-art defect detection and analysis tools, and cooperation between the organizations that affect the quality of the material shipped from a wafer fab line. Considerations for organizational design, the role of the defect reduction engineer, and the defect reduction strategy are presented along with specific defect density, and yield improvement examples

Keywords

integrated circuit manufacture; monolithic integrated circuits; quality control; defect density; defect detection tools; defect reduction engineer; defect reduction program; defect reduction strategy; management commitment; organizational structure; wafer fab line; yield improvement; Automatic testing; Circuit synthesis; Computerized monitoring; Design engineering; Engineering management; Inspection; Manufacturing processes; Production; Quality management; Semiconductor device modeling;

fLanguage

English

Publisher

ieee

Conference_Titel

Advanced Semiconductor Manufacturing Conference and Workshop, 1990. ASMC 90 Proceedings. IEEE/SEMI 1990

Conference_Location

Danvers, MA

Type

conf

DOI

10.1109/ASMC.1990.111224

Filename

111224