A comprehensive IC yield analysis system in RS1

Author

Trahan, Robert ; Dean, Kevin

Author_Institution

Motorola Inc., Austin, TX, USA

fYear

1990

fDate

11-12 Sep 1990

Firstpage

99

Lastpage

103

Abstract

A software-based solution for integrated-circuit (IC) yield analysis is presented. A methodology for the incorporation of process test insert, product test, and product yield data from various sources is given. This information is then formatted into a common database, specifically RS1, where both RS1 and company-generated software procedures can perform statistical yield analysis on chosen data. System features highlighted include automatic operation, modular architecture for expansion, SPC, and yield reporting capabilities. Several examples of product yield enhancements utilizing test structure data and system procedures are presented

Keywords

database management systems; electronic engineering computing; integrated circuit manufacture; production testing; statistical process control; IC yield analysis system; SPC; automatic operation; company-generated software; modular architecture; process test insert; product test; product yield; software-based solution; statistical yield analysis; yield reporting; Circuit testing; Costs; Data analysis; Hardware; Integrated circuit testing; Integrated circuit yield; Performance analysis; Process control; Semiconductor device packaging; System testing;

fLanguage

English

Publisher

ieee

Conference_Titel

Advanced Semiconductor Manufacturing Conference and Workshop, 1990. ASMC 90 Proceedings. IEEE/SEMI 1990

Conference_Location

Danvers, MA

Type

conf

DOI

10.1109/ASMC.1990.111229

Filename

111229