Title :
A comprehensive IC yield analysis system in RS1
Author :
Trahan, Robert ; Dean, Kevin
Author_Institution :
Motorola Inc., Austin, TX, USA
Abstract :
A software-based solution for integrated-circuit (IC) yield analysis is presented. A methodology for the incorporation of process test insert, product test, and product yield data from various sources is given. This information is then formatted into a common database, specifically RS1, where both RS1 and company-generated software procedures can perform statistical yield analysis on chosen data. System features highlighted include automatic operation, modular architecture for expansion, SPC, and yield reporting capabilities. Several examples of product yield enhancements utilizing test structure data and system procedures are presented
Keywords :
database management systems; electronic engineering computing; integrated circuit manufacture; production testing; statistical process control; IC yield analysis system; SPC; automatic operation; company-generated software; modular architecture; process test insert; product test; product yield; software-based solution; statistical yield analysis; yield reporting; Circuit testing; Costs; Data analysis; Hardware; Integrated circuit testing; Integrated circuit yield; Performance analysis; Process control; Semiconductor device packaging; System testing;
Conference_Titel :
Advanced Semiconductor Manufacturing Conference and Workshop, 1990. ASMC 90 Proceedings. IEEE/SEMI 1990
Conference_Location :
Danvers, MA
DOI :
10.1109/ASMC.1990.111229
