Title :
A comprehensive CAM environment for fast-turn IC prototyping
Author :
Barnum, C.B. ; Cunningham, D.J.
Author_Institution :
Massachusetts Microelectron. Center, Westborough, MA, USA
Abstract :
A prototype integrated-circuit (IC) computer-aided-manufacturing (CAM) environment to support university education and research programs is described. The CAM system, mask making, and wafer fabrication are discussed. Process controls and the assembly process are described
Keywords :
CAD/CAM; education; integrated circuit manufacture; masks; process computer control; CAM environment; assembly process; computer-aided-manufacturing; fast-turn IC prototyping; mask making; process control; university education; university research; wafer fabrication; Assembly; CADCAM; Computer aided manufacturing; Educational institutions; Fabrication; Microelectronics; Production facilities; Prototypes; Very large scale integration; Voice mail;
Conference_Titel :
Advanced Semiconductor Manufacturing Conference and Workshop, 1990. ASMC 90 Proceedings. IEEE/SEMI 1990
Conference_Location :
Danvers, MA
DOI :
10.1109/ASMC.1990.111230
