DocumentCode
2591909
Title
The Advanced Semiconductor Technology Center: a technology engine for the future
Author
Kristoff, J.S.
Author_Institution
IBM Corp., Hopewell Junction, NY, USA
fYear
1990
fDate
11-12 Sep 1990
Firstpage
112
Abstract
Summary form only given. IBM´s Advanced Semiconductor Technology Center (ASTC), which provides a model of a development fabricator for future generations of semiconductor technology, is discussed. The ASTC assures development with a manufacturing environment. Facilities, equipment, and materials have been designed to meet future technology manufacturability. Some technology trends are given
Keywords
semiconductor device manufacture; semiconductor technology; technological forecasting; Advanced Semiconductor Technology Center; IBM; development fabricator; manufacturing environment; model; semiconductor technology; technology engine; technology manufacturability; technology trends; Circuits; Collaboration; Contamination; Costs; Engines; Manufacturing automation; Manufacturing processes; Monitoring; Semiconductor device manufacture; Semiconductor materials;
fLanguage
English
Publisher
ieee
Conference_Titel
Advanced Semiconductor Manufacturing Conference and Workshop, 1990. ASMC 90 Proceedings. IEEE/SEMI 1990
Conference_Location
Danvers, MA
Type
conf
DOI
10.1109/ASMC.1990.111232
Filename
111232
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