Title :
The Advanced Semiconductor Technology Center: a technology engine for the future
Author_Institution :
IBM Corp., Hopewell Junction, NY, USA
Abstract :
Summary form only given. IBM´s Advanced Semiconductor Technology Center (ASTC), which provides a model of a development fabricator for future generations of semiconductor technology, is discussed. The ASTC assures development with a manufacturing environment. Facilities, equipment, and materials have been designed to meet future technology manufacturability. Some technology trends are given
Keywords :
semiconductor device manufacture; semiconductor technology; technological forecasting; Advanced Semiconductor Technology Center; IBM; development fabricator; manufacturing environment; model; semiconductor technology; technology engine; technology manufacturability; technology trends; Circuits; Collaboration; Contamination; Costs; Engines; Manufacturing automation; Manufacturing processes; Monitoring; Semiconductor device manufacture; Semiconductor materials;
Conference_Titel :
Advanced Semiconductor Manufacturing Conference and Workshop, 1990. ASMC 90 Proceedings. IEEE/SEMI 1990
Conference_Location :
Danvers, MA
DOI :
10.1109/ASMC.1990.111232
