Title :
Performance analysis of multi-process semiconductor manufacturing equipment
Author :
Atherton, Robert W. ; Turner, Frederick T. ; Atherton, Linda F. ; Pool, Mark A.
Author_Institution :
In-Motion Technol. Inc., Mountain View, CA, USA
Abstract :
A general dynamic model of the cycle-time performance of production integrated processing equipment (PIPE) is discussed. This model has been used to analyze the performance of existing PIPE designs and to derive design enhancements. The performance predictions of the model are compared to measurements of PIPE operation. Case studies of PIPE operation indicate possible production advantages over conventional equipment
Keywords :
process control; production control; semiconductor device manufacture; PIPE; cycle-time performance; dynamic model; multi-process semiconductor manufacturing equipment; performance predictions; production integrated processing equipment; Performance analysis; Plasma applications; Plasma materials processing; Predictive models; Production; Semiconductor device manufacture; Semiconductor device modeling; Semiconductor process modeling; Throughput; Virtual manufacturing;
Conference_Titel :
Advanced Semiconductor Manufacturing Conference and Workshop, 1990. ASMC 90 Proceedings. IEEE/SEMI 1990
Conference_Location :
Danvers, MA
DOI :
10.1109/ASMC.1990.111237
