DocumentCode
2592003
Title
Performance analysis of multi-process semiconductor manufacturing equipment
Author
Atherton, Robert W. ; Turner, Frederick T. ; Atherton, Linda F. ; Pool, Mark A.
Author_Institution
In-Motion Technol. Inc., Mountain View, CA, USA
fYear
1990
fDate
11-12 Sep 1990
Firstpage
131
Lastpage
136
Abstract
A general dynamic model of the cycle-time performance of production integrated processing equipment (PIPE) is discussed. This model has been used to analyze the performance of existing PIPE designs and to derive design enhancements. The performance predictions of the model are compared to measurements of PIPE operation. Case studies of PIPE operation indicate possible production advantages over conventional equipment
Keywords
process control; production control; semiconductor device manufacture; PIPE; cycle-time performance; dynamic model; multi-process semiconductor manufacturing equipment; performance predictions; production integrated processing equipment; Performance analysis; Plasma applications; Plasma materials processing; Predictive models; Production; Semiconductor device manufacture; Semiconductor device modeling; Semiconductor process modeling; Throughput; Virtual manufacturing;
fLanguage
English
Publisher
ieee
Conference_Titel
Advanced Semiconductor Manufacturing Conference and Workshop, 1990. ASMC 90 Proceedings. IEEE/SEMI 1990
Conference_Location
Danvers, MA
Type
conf
DOI
10.1109/ASMC.1990.111237
Filename
111237
Link To Document