Title :
Fluidic sensors based on vibrating miniaturized devices
Author :
Jakoby, Bernhard
Author_Institution :
Inst. for Microelectron. & Microsensors, Johannes Kepler Univ. Linz, Linz, Austria
Abstract :
This paper reviews our recent work on vibrating sensors for the physical properties of fluids, particularly viscosity and density. Several device designs and the associated properties, specifically with respect to the sensed rheological domain are discussed.
Keywords :
vibrations; viscosity; viscosity measurement; fluidic sensors; sensed rheological domain; vibrating miniaturized devices; Chemical processes; Chemical sensors; Chemical transducers; Condition monitoring; Force measurement; Liquids; Rheology; Sensor arrays; Stress; Viscosity;
Conference_Titel :
Frequency Control Symposium, 2009 Joint with the 22nd European Frequency and Time forum. IEEE International
Conference_Location :
Besancon
Print_ISBN :
978-1-4244-3511-1
Electronic_ISBN :
1075-6787
DOI :
10.1109/FREQ.2009.5168306
