DocumentCode
2592847
Title
Fluidic sensors based on vibrating miniaturized devices
Author
Jakoby, Bernhard
Author_Institution
Inst. for Microelectron. & Microsensors, Johannes Kepler Univ. Linz, Linz, Austria
fYear
2009
fDate
20-24 April 2009
Firstpage
842
Lastpage
849
Abstract
This paper reviews our recent work on vibrating sensors for the physical properties of fluids, particularly viscosity and density. Several device designs and the associated properties, specifically with respect to the sensed rheological domain are discussed.
Keywords
vibrations; viscosity; viscosity measurement; fluidic sensors; sensed rheological domain; vibrating miniaturized devices; Chemical processes; Chemical sensors; Chemical transducers; Condition monitoring; Force measurement; Liquids; Rheology; Sensor arrays; Stress; Viscosity;
fLanguage
English
Publisher
ieee
Conference_Titel
Frequency Control Symposium, 2009 Joint with the 22nd European Frequency and Time forum. IEEE International
Conference_Location
Besancon
ISSN
1075-6787
Print_ISBN
978-1-4244-3511-1
Electronic_ISBN
1075-6787
Type
conf
DOI
10.1109/FREQ.2009.5168306
Filename
5168306
Link To Document