A high-Q magnetostatically-tunable all-silicon evanescent cavity resonator

Summary form only given, as follows. We present, for the first time, an all-silicon magnetostatically-tunable evanescent-mode cavity resonator that is capable of analog tuning from 9.5 to 17 GHz (1∶1.8) while maintaining a high unloaded quality factor (Q) of 650–950 (70–80% of the simulated results). The resonator is fabricated using silicon micromachining and is tuned by moving a gold-covered single-crystal silicon diaphragm over the capacitive post using magnetostatic actuation.