• DocumentCode
    2594686
  • Title

    Miniature RF MEMS metal-contact switches for DC-20 GHz applications

  • Author

    Stefanini, Romain ; Chatras, Matthieu ; Blondy, Pierre ; Rebeiz, Gabriel M.

  • Author_Institution
    XLIM, Limoges, France
  • fYear
    2011
  • fDate
    5-10 June 2011
  • Firstpage
    1
  • Lastpage
    1
  • Abstract
    Summary form only given, as follows. This paper presents the design and measurement of a miniature RF MEMS metal-contact switch. Measured S-parameters on a single switch show an up-state capacitance of 5 fF and a 13–14 Ω contact resistance for a Au-Ru contact under an actuation voltage of 55 V. Then, 10 miniature RF MEMS switches have been placed in parallel and result in an up-state capacitance of 30 fF and a switch resistance of 1.4 Ω. The switch is robust to stress effects which increases its yield on large wafers.
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microwave Symposium Digest (MTT), 2011 IEEE MTT-S International
  • Conference_Location
    Baltimore, MD
  • ISSN
    0149-645X
  • Print_ISBN
    978-1-61284-754-2
  • Electronic_ISBN
    0149-645X
  • Type

    conf

  • DOI
    10.1109/MWSYM.2011.5973337
  • Filename
    5973337
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2594686