Development of a Micro-mechanical Logic Inverter for Low Frequency MEMS Sensor Interfacing

Author

Chakraborty, Subha ; Bhattacharyya, T.K.

Author_Institution

Dept. of Electron. & Electr. Commun. Eng., IIT Kharagpur, Kharagpur, India

fYear

2011

fDate

2-7 Jan. 2011

Firstpage

201

Lastpage

207

Abstract

This paper presents the development of a micro mechanical inverter for signal processing applications in low frequency MEMS sensors. The inverter consists of two MEMS contact switches connected in complementary configuration. The working principle of the inverter has been thoroughly explained and the design and performance analysis of the inverter have been systematically worked out using a top-down approach. PolyMUMPs surface micro machining process has been utilized for implementing and fabricating the MEMS inverter. The mechanical response and the switching response of the cantilevers have been extensively investigated. Static functional characterization of the inverter has been successfully carried out.

Keywords

logic circuits; logic design; micromachining; microsensors; MEMS contact switches; PolyMUMP; low frequency MEMS Sensor Interfacing; micro-mechanical logic inverter; signal processing; surface micromachining; Damping; Electrodes; Inverters; Laser beams; Micromechanical devices; Structural beams; Vibrations; Euler Bernoulli equation; MEMS; inverter; pull-in; stiction; surface micro-machining; transfer characteristics;

fLanguage

English

Publisher

ieee

Conference_Titel

VLSI Design (VLSI Design), 2011 24th International Conference on

Conference_Location

Chennai

ISSN

1063-9667

Print_ISBN

978-1-61284-327-8

Electronic_ISBN

1063-9667

Type

conf

DOI

10.1109/VLSID.2011.26

Filename

5718802